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Publication Citation: Testing Displacement-Measuring Interferometer Systems

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Author(s): Jack A. Stone Jr.; Martin Schroeck; Michael T. Stocker;
Title: Testing Displacement-Measuring Interferometer Systems
Published: January 01, 1998
Abstract: We have made a study of one method for testing displacement-measuring interferometer systems, a modified back-to-back comparison, that automatically compensates for changes in the optical path length between the two interferometers.  Although this method has certain disadvantages relative to other possible approaches, the ultimate achievable accuracy is entirely satisfactory, and the method provides greater flexibility than do alternate approaches.  When testing interferometer systems we currently achieve a length-proportional expanded uncertainty (coverage factor k=2) of D1/1=1x10-7, where 1 is the measured displacement.  Although this uncertainty is sufficiently small to satisfy present commercial demands, it may be possible to further reduce the uncertainty with modest additional effort.
Conference: Measurements Science Conference
Proceedings: Proceedings of Measurements Science Conference
Location: Unknown, USA
Dates: February 1, 1998
Keywords: interferometer calibration,interferometer comparisons,interferometry
Research Areas: Metrology, Manufacturing