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Publication Citation: Design Optimization for a Parallel MEMS Mechanism with Flexure Joints

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Author(s): Byoung H. Kang; J Wen; Nicholas G. Dagalakis; Jason J. Gorman;
Title: Design Optimization for a Parallel MEMS Mechanism with Flexure Joints
Published: October 04, 2004
Abstract: This paper presents an analysis tool and design method forMEMS parallel mechanisms. Due to processing constraints inMEMS fabrication, flexure joints are frequently used in MEMSmechanisms. Flexure joints offer advantages over other joint designdue to their monolithic characteristics. They can be usedto reduce the size of manipulators or to increase the precisionof motion. Their inherent flexibility, however, also results in taskspace compliance which needs to be carefully designed to matchthe task specification. This paper presents an analysis and designtool for such mechanisms by using the differential kinematics.Performance metrics are chosen based on manipulability andtask stiffness matrices, which in turn are used in a multi-objectiveoptimization. As an illustrative example, a 1-DOF MEMS parallelmechanism based on the macro- and meso-scale modelsdesigned by NIST is considered with several choices of performancemetrics and design variables. The resulting designs aresuccessfully fabricated using DRIE process.
Conference: ASME Design Engineering Technical Conference
Proceedings: Proceedings of ASME Design Engineering Technical Conferences
Volume: DETC2004/MECH-57455
Location: Salt Lake City, UT
Dates: September 28-October 2, 2004
Keywords: flexure;MEMS;optimization;parallel mechanism
Research Areas: Metrology and Standards for Manufacturing Systems and Data
PDF version: PDF Document Click here to retrieve PDF version of paper (1MB)