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|Author(s):||Ulf Griesmann; Nadia Machkour-Deshayes; Byoung C. Kim; Quandou (. Wang; Lahsen Assoufid;|
|Title:||Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST|
|Published:||July 31, 2005|
|Abstract:||The Geometry Measuring Machine (GEMM) of the National Institute of Standards and Technology (NIST) is a profilometer for free-form surfaces. A profile is reconstructed from local curvature of a test part surface, measured at several locations along a line. For profile measurements of free-form surfaces, methods based on local part curvature sensing have strong appeal. Unlike full-aperture interferometry they do not require customized null optics. The uncertainty of a reconstructed profile is critically dependent upon the uncertainty of the curvature measurement and on curvature sensor positioning. For an instrument of the GEMM type, we evaluate the measurement uncertainties for a curvature sensor based on a small aperture interferometer and then estimate the uncertainty in the reconstructed profile that can be achieved. In addition, profile measurements of a free-form mirror, made with GEMM, are compared with measurements using a long-trace profiler and subaperture-stitching interferometry.|
|Proceedings:||SPIE - Optics and Photonics|
|Pages:||pp. 112 - 124|
|Location:||San Diego, CA|
|Dates:||July 31-August 4, 2005|
|Keywords:||aspheric surface profile,profilometer,surface curvature|
|Research Areas:||Dimensional Metrology|