| Author(s): |
Quandou Wang; Ulf Griesmann; |
| Title: |
Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine |
| Published: |
January 01, 2006 |
| Abstract: |
We describe the design of a miniature Fizeau interferometer, which is intended to be an accurate curvature sensor for the NIST Geometry Measuring (GEMM), which is used to measure aspheric and free form surfaces. The interferometer was designed for simultaneous measurements of figure and the distance between the sensor and part under test. |
| Conference: |
Technical Digest of the 2006 Optical Society of America Optical Fabrication and Testing Meeting |
| Location: |
Rochester, NY |
| Dates: |
October 9-11, 2006 |
| Research Areas: |
Dimensional Metrology |
