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Publication Citation: Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine

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Author(s): Quandou Wang; Ulf Griesmann;
Title: Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine
Published: January 01, 2006
Abstract: We describe the design of a miniature Fizeau interferometer, which is intended to be an accurate curvature sensor for the NIST Geometry Measuring (GEMM), which is used to measure aspheric and free form surfaces. The interferometer was designed for simultaneous measurements of figure and the distance between the sensor and part under test.
Conference: Technical Digest of the 2006 Optical Society of America Optical Fabrication and Testing Meeting
Location: Rochester, NY
Dates: October 9-11, 2006
Research Areas: Dimensional Metrology