| Author(s): |
Michael T. Postek; Richard R. Cavanagh; C M. Allocca; Douglas T. Smith; Robert D. Shull; David A. Wollman; David G. Seiler; Stephen Knight; A Diebold; Richard M. Silver; Charles W. Clark; Kevin W. Lyons; James R. Whetstone; Ronald F. Boisvert; |
| Title: |
National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenge Report |
| Published: |
August 01, 2006 |
| Abstract: |
|
| Conference: |
National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology |
| Proceedings: |
National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenge Report |
| Location: |
Gaithersburg, MD |
| Dates: |
January 27-29, 2004 |
| Keywords: |
metrology;nanocharacterization;nanoelectronics;nanofabrication;nanomagnetic;nanomanufacturing;nanomechanics;nanotechnology;photonics |
| Research Areas: |
Metrology, Manufacturing |
