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Publication Citation: National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenge Report

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Author(s): Michael T. Postek; Richard R. Cavanagh; C M. Allocca; Douglas T. Smith; Robert D. Shull; David A. Wollman; David G. Seiler; Stephen Knight; A Diebold; Richard M. Silver; Charles W. Clark; Kevin W. Lyons; James R. Whetstone; Ronald F. Boisvert;
Title: National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenge Report
Published: August 01, 2006
Abstract:
Conference: National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology
Proceedings: National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenge Report
Location: Gaithersburg, MD
Dates: January 27-29, 2004
Keywords: metrology;nanocharacterization;nanoelectronics;nanofabrication;nanomagnetic;nanomanufacturing;nanomechanics;nanotechnology;photonics
Research Areas: Metrology, Manufacturing