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Publication Citation: Characterization of Prototype Silicon Pitch Artifacts Fabricated by Scanning Probe Lithography and Anisotropic Wet Etching

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Author(s): F S. Chien; W F. Hsieh; S Gwo; Jay S. Jun; Richard M. Silver; Andras Vladar; John A. Dagata;
Title: Characterization of Prototype Silicon Pitch Artifacts Fabricated by Scanning Probe Lithography and Anisotropic Wet Etching
Published: January 01, 2005
Abstract:
Citation: Journal of Applied Physics
Volume: 23
Issue: No. 1
Keywords: nanofabrication;pattern placement error;probe oxidation;scanning
Research Areas: Metrology, Manufacturing