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Publication Citation: Influence of analysis Algorithms on the Value of Distorted Step Height Data

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Author(s): Ndubuisi G. Orji; Jayaraman Raja; Son H. Bui; Theodore V. Vorburger;
Title: Influence of analysis Algorithms on the Value of Distorted Step Height Data
Published: September 01, 2003
Abstract: One of the most important aspects of step height evaluation are the analysis algorithms used. There algorithms assume that the profiles and images being analyzed are ideal, but real step profiles are not ideal and the analysis algorithms can influence the results obtained. We explore some of the variations in results obtained when using three of the most common step height algorithms. Ways to reduced variability are outlined and disucssed.
Conference: Ninth International Conference on Metrology and Properties of Engineering Surfaces
Proceedings: Proceedings of Ninth International Conference on Metrology and Properties of Engineering Surfaces
Location: Halmstad, SW
Dates: September 10-11, 2003
Keywords: algorithms;profile distortion;step height
Research Areas: Metrology, Manufacturing