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Publication Citation: Internet-Based Surface Metrology Algorithm Testing System

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Author(s): Son H. Bui; Thomas B. Renegar; Theodore V. Vorburger; Jayaraman Raja; Mark C. Malburg;
Title: Internet-Based Surface Metrology Algorithm Testing System
Published: December 01, 2004
Abstract: This paper presents the development of an Internet-based surface metrology algorithm testing system. The system includes peer-reviewed surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National Institute of Standards and Technology (NIST), USA. Companies, universities, and instrument manufacturers have Internet access to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry.
Citation: Wear
Volume: 257
Issue: 12
Pages: pp. 1213 - 1218
Keywords: surface;topography;textures;parameters;filtering;software;database
Research Areas: Metrology, Manufacturing