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|Author(s):||Son H. Bui; Thomas B. Renegar; Theodore V. Vorburger; Jayaraman Raja; Mark C. Malburg;|
|Title:||Internet-Based Surface Metrology Algorithm Testing System|
|Published:||December 01, 2004|
|Abstract:||This paper presents the development of an Internet-based surface metrology algorithm testing system. The system includes peer-reviewed surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National Institute of Standards and Technology (NIST), USA. Companies, universities, and instrument manufacturers have Internet access to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry.|
|Pages:||pp. 1213 - 1218|
|Research Areas:||Manufacturing, Metrology|