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Publication Citation: Surface Finish and Sub-Surface Metrology

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Author(s): Theodore V. Vorburger; Ndubuisi G. Orji; Li Piin Sung; T Rodriguez;
Title: Surface Finish and Sub-Surface Metrology
Published: January 01, 2003
Abstract: Surface finsih affects the performance of a wide variety of manufactured products ranging from road surfaces and ships to mechanical parts, microelectronics, and optics. Accordingly roughness values can vary over many orders of magnitude. A variety of techniques have been developed for measuring such a wide a range of vertical and lateral roughness features.However, they may generally be classified into three basic types, linear profiling, area profiling (or areal topography), and area averaging. In this paper we focus on profiling and areal topography methods and in particular on two optical mthods, the vertical scanning interferometric microscope and confocal microscope. We emphasize results for sinusoidal profile roughness standards and for metallic particles in coatings.
Conference: Aerospace Metrology Seminar
Proceedings: Proceedings of Aerospace Metrology Seminar
Location: V Semetra São Jose dos Campos, BR
Dates: July 3, 2003
Keywords: coating;confocal microscopy;finish;metrology;roughness;scanning interferometry;sinusoidal;Standard Reference Material
Research Areas: Metrology, Manufacturing