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Publication Citation: Inverse Electron Beam Modeling and Metrology Research

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Author(s): Michael T. Postek; Andras Vladar; J R. Lowney; Robert D. Larrabee; William J. Keery;
Title: Inverse Electron Beam Modeling and Metrology Research
Published: April 01, 1998
Abstract:
Citation: Scanning
Volume: 20(3)
Research Areas: Metrology, Manufacturing