Publication Citation
NIST Authors in Bold
 |
| Author(s): | Michael T. Postek; Andras Vladar; J R. Lowney; Robert D. Larrabee; William J. Keery; |
|---|---|
| Title: | Inverse Electron Beam Modeling and Metrology Research |
| Published: | April 01, 1998 |
| Abstract: | |
| Citation: | Scanning |
| Volume: | 20(3) |
| Research Areas: | Metrology, Manufacturing |