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Report of Investigation: Reference Material 8091 - Scanning Electron Microscope Sharpness Standard
Published
Author(s)
Michael T. Postek, Andras Vladar, Robert D. Larrabee
Abstract
Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small (2 rnrn x 2 rnm) diced semiconductor chip. This sample is capable of being mounted directly on to a wafer, wafer piece, or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope (SEM). The chip can also be mounted onto a 'drop-in' type wafer holder. RM 8091 is fully compatible with state-of-the-art integrated circuit technology.
Postek, M.
, Vladar, A.
and Larrabee, R.
(2001),
Report of Investigation: Reference Material 8091 - Scanning Electron Microscope Sharpness Standard, Report of Investigation
(Accessed April 27, 2024)