NIST logo

Publication Citation: Simulation and Measurement of Subsurface Features in Scanning Electron Microscopy Metrology

NIST Authors in Bold

Author(s): J R. Lowney; Michael T. Postek; Samuel N. Jones; S Mayo; Michael W. Cresswell;
Title: Simulation and Measurement of Subsurface Features in Scanning Electron Microscopy Metrology
Published: April 01, 1998
Abstract:
Citation: Scanning
Volume: 20(3)
Pages: pp. 219 - 220
Research Areas: Metrology, Manufacturing