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Publication Citation: Kinematic Modeling and Analysis of a Planar Micro-Positioner

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Author(s): Nicholas G. Dagalakis; John A. Kramar; E Amatucci; Robert Bunch;
Title: Kinematic Modeling and Analysis of a Planar Micro-Positioner
Published: January 01, 2001
Abstract: The static and dynamic performance of a control system depends on the accuracy of the mathematical model of the plant that is being controlled. In this work, the accuracies of a linear and a second-order kinematic model were evaluated for a two-dimensional, planar, micro-positioner plant. The model performances were evaluated for a variety of testing conditions including a variation of the number of test points, the addition of sensor noise, and six different least-squares fitting algorithms. In general, decreasing the number of fitting points or increasing the noise results in worse performance, as expected. The second-order model was better for low noise and larger data sets, but was worse under the more challenging conditions. All but one of the least-squares algorithms performed similarly well.
Conference: Proceedings of the American Society for Precision Engineering
Volume: 25
Pages: pp. 135 - 138
Location: Arlington, VA
Dates: November 10-15, 2001
Keywords: Kinematic;Micro-positioner;Model;Performance
Research Areas: Metrology, Manufacturing