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|Author(s):||Nicholas G. Dagalakis; John A. Kramar; E Amatucci; Robert Bunch;|
|Title:||Kinematic Modeling and Analysis of a Planar Micro-Positioner|
|Published:||January 01, 2001|
|Abstract:||The static and dynamic performance of a control system depends on the accuracy of the mathematical model of the plant that is being controlled. In this work, the accuracies of a linear and a second-order kinematic model were evaluated for a two-dimensional, planar, micro-positioner plant. The model performances were evaluated for a variety of testing conditions including a variation of the number of test points, the addition of sensor noise, and six different least-squares fitting algorithms. In general, decreasing the number of fitting points or increasing the noise results in worse performance, as expected. The second-order model was better for low noise and larger data sets, but was worse under the more challenging conditions. All but one of the least-squares algorithms performed similarly well.|
|Conference:||Proceedings of the American Society for Precision Engineering|
|Pages:||pp. 135 - 138|
|Dates:||November 10-15, 2001|
|Research Areas:||Metrology, Manufacturing|