TY  - CONF
AU  - Dagalakis, Nicholas
AU  - Kramar, John
AU  - Amatucci, E
AU  - Bunch, Robert
C2  - Proceedings of the American Society for Precision Engineering, Arlington, VA
DA  - 2001-01-01
LA  - en
M1  - 25
PB  - Proceedings of the American Society for Precision Engineering, Arlington, VA
PY  - 2001
TI  - Kinematic Modeling and Analysis of a Planar Micro-Positioner
ER  -