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NIST Authors in Bold
|Author(s):||R E. Parks; E Robert; Christopher J. Evans; David J. Roderick; J David; John A. Dagata;|
|Title:||Applications of the Rapidly Renewable Lap|
|Published:||November 01, 1997|
|Abstract:||The rapidly renewable lap is based on the simple concept of generating the figure needed in a lap substrate and then replicating it into a thin film slumped over the substrate. Based on this concept, we describe how efficient laps can be constructed for the lapping and polishing of crystalline, amorphous, and metallic surfaces.|
|Proceedings:||Proceedings of SPIE, Optical Manufacturing and Testing II, H. Philip Stahl, Editor|
|Pages:||pp. 240 - 251|
|Location:||San Diego, CA|
|Dates:||July 27, 1997|
|Research Areas:||Manufacturing, Metrology|