Yuan, Y.
, Vorburger, T.
, Song, J.
and Renegar, T.
(2000),
A Simplified Realization for the Gaussian Filter in Surface Metrology, X. International Colloquium on Surfaces, M. Dietzsch, H. Trumpold, Editors, (Shaker Verlag GmbH, Aachen, 2000), Chemnitz, GE
(Accessed April 26, 2024)
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A Simplified Realization for the Gaussian Filter in Surface Metrology
Published
Author(s)
, , ,
Abstract
A simplified realization for the Gaussian filter in surface metrology is presented in this paper. The sampling function sinu/u is used for simplifying the Gaussian function. According to the central limit theorem, when n approaches infinity, the function (sinu/u)^n approaches the form of a Gaussian function. So designed, the Gaussian filter is easily realized with high accuracy, high efficiency and without phase distortion. The relationship between the Gaussian filtered mean line and the mid-point locus (or moving average) mean line is also discussed.Proceedings Title
X. International Colloquium on Surfaces, M. Dietzsch, H. Trumpold, Editors, (Shaker Verlag GmbH, Aachen, 2000)
Conference Dates
January 31-February 2, 2000
Conference Location
Chemnitz, GE
Pub Type
Conferences
Keywords
Gaussian filter, mean line, sampling function, surface roughness
Citation
Created January 1, 2000, Updated February 19, 2017