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Publication Citation: 1998-99 NIST/International SEMATECH Collaboration to Develop Atom-Based Linewidth Standards

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Author(s): Richard M. Silver;
Title: 1998-99 NIST/International SEMATECH Collaboration to Develop Atom-Based Linewidth Standards
Published: January 01, 2000
Abstract: This is the final report for the SEMATECH funded SEMATECH/NIST contract for the development of atom-based standard artifacts. This report is intended to summarize the progress completed on the technical elements and is intended as a general release document. This project, which is a portion of a larger NIST effort, was aimed at the development of three-dimensional structures of controlled geometry whose dimensions can be measured and traced directly to the intrinsic crystal lattice. These samples are intended to be dimensionally stable to allow transfer to other measurement tools which can measure the artifacts with dimensions known on the nanometer scale.
Citation: SEMATECH Tech Transfer Document; NIST/SEMATECH Proprietary
Keywords: atom-based;crystal;metrology;standards
Research Areas: Metrology, Manufacturing