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Publication Citation: Industrial Uses of STM and AFM

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Author(s): Theodore V. Vorburger; John A. Dagata; G. Wilkening; K Iizuka;
Title: Industrial Uses of STM and AFM
Published: January 01, 1997
Abstract: We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applications on-line in manufacturing. We also discuss the role of metrology for certain applications and briefly review many other types of SPMs besides STM and AFM. We conclude by emphasizing ultra-precision positioning, nanofabrication, and biomedical applications as important future directions in the field.
Citation: Annals CIRP
Volume: 47(2)
Pages: pp. 597 - 620
Keywords: atomic force microscopy (AFM);Scanning probe microscopy (SPM);Scanning tunneling microscopy (STM)
Research Areas: Metrology, Manufacturing