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NIST Authors in Bold
|Author(s):||Theodore V. Vorburger; John A. Dagata; G. Wilkening; K Iizuka;|
|Title:||Industrial Uses of STM and AFM|
|Published:||January 01, 1997|
|Abstract:||We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applications on-line in manufacturing. We also discuss the role of metrology for certain applications and briefly review many other types of SPMs besides STM and AFM. We conclude by emphasizing ultra-precision positioning, nanofabrication, and biomedical applications as important future directions in the field.|
|Pages:||pp. 597 - 620|
|Keywords:||atomic force microscopy (AFM),Scanning probe microscopy (SPM),Scanning tunneling microscopy (STM)|
|Research Areas:||Manufacturing, Metrology|