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NIST Authors in Bold
|Author(s):||John S. Villarrubia;|
|Title:||Blind Estimation of Tip Geometry in Scanned Probe Microscopy|
|Published:||August 01, 1997|
|Abstract:||Broadening of surface protrusions is a well-known imaging artifact in scanned probe microscope topographs. Blind reconstruction is a method for estimating the tip shape from the image of a tip characterizer, without independent knowledge of the characterizer geometry. A description of and a plausibility argument for blind reconstruction are given. A recent development for discriminating against other (non-tip-induced) image artifacts is summarized.|
|Proceedings:||Proceedings of Microscopy and Microanalysis|
|Dates:||August 1, 1997|
|Keywords:||atomic force microscopy,blind reconstruction,scanned probe microscopy,scanning tunneling microscopy,tip artifacts,tip estimation|
|Research Areas:||Metrology, Manufacturing|