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Publication Citation: Blind Estimation of Tip Geometry in Scanned Probe Microscopy

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Author(s): John S. Villarrubia;
Title: Blind Estimation of Tip Geometry in Scanned Probe Microscopy
Published: August 01, 1997
Abstract: Broadening of surface protrusions is a well-known imaging artifact in scanned probe microscope topographs. Blind reconstruction is a method for estimating the tip shape from the image of a tip characterizer, without independent knowledge of the characterizer geometry. A description of and a plausibility argument for blind reconstruction are given. A recent development for discriminating against other (non-tip-induced) image artifacts is summarized.
Proceedings: Proceedings of Microscopy and Microanalysis
Volume: 3
Issue: Supplement 2
Pages: 2 pp.
Location: Unknown, USA
Dates: August 1, 1997
Keywords: atomic force microscopy;blind reconstruction;scanned probe microscopy;scanning tunneling microscopy;tip artifacts;tip estimation
Research Areas: Metrology, Manufacturing