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Publication Citation: Fourier Transform Feedback for Scanning Electron Microscopes Used in Semiconductor Metrology

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Author(s): Michael T. Postek; Andras Vladar; M P. Davidson;
Title: Fourier Transform Feedback for Scanning Electron Microscopes Used in Semiconductor Metrology
Published: July 01, 1997
Abstract: The utility of the sharpness concept for use on metrology scanning electron microscopes (SEM) as implemented through the Fourier transform technique has been clearly demonstrated and documented. The original methods for sharpness analysis were labor-intensive and, therefore, not suited to industrial applications like the semiconductor integrated circuit production. We have integrated these techniques into an easy to use and stand alone software package called SEMMON which makes the analysis easy and, moreover, can serve as a prototype for integration into a production tool. This paper will present the general philosophy of the system and analytical data taken from both laboratory and production instruments to prove both the relevance of the sharpness concept and the usefulness of this tool for SEM performance monitoring.
Conference: Scanning Probe Metrology I
Proceedings: Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XI, Susan K. Jones, Editor
Volume: 3050
Pages: pp. 68 - 79
Location: Santa Clara, CA
Dates: March 10, 1997
Keywords: Fourier;image analysis;metrology;performance;resolution;scanning electron microscope;sharpness
Research Areas: Metrology, Manufacturing