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Publication Citation: Integral Equations for Scattering by a Particle in a Layer

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Author(s): Egon Marx;
Title: Integral Equations for Scattering by a Particle in a Layer
Published: January 01, 1997
Abstract: The single integral equation method is applied to the scattering of electromagnetic waves by particles in a layer on top of a substrate. A second layer on top of the first one can have indentations.
Proceedings: 1997 Digest of IEEE/APS International Symposium
Pages: pp. 878 - 881
Keywords: electromagnetic scattering,integral equations,paint coatings,photoresist layer,point-matching method,resonance region
Research Areas: Manufacturing, Metrology