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|Title:||Integral Equations for Scattering by a Particle in a Layer|
|Published:||January 01, 1997|
|Abstract:||The single integral equation method is applied to the scattering of electromagnetic waves by particles in a layer on top of a substrate. A second layer on top of the first one can have indentations.|
|Proceedings:||1997 Digest of IEEE/APS International Symposium|
|Pages:||pp. 878 - 881|
|Keywords:||electromagnetic scattering,integral equations,paint coatings,photoresist layer,point-matching method,resonance region|
|Research Areas:||Manufacturing, Metrology|