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Publication Citation: Workshop Discussion: A Framework for Standards Development and the Future of the IASPM Workshops

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Author(s): John A. Dagata;
Title: Workshop Discussion: A Framework for Standards Development and the Future of the IASPM Workshops
Published: January 01, 1997
Abstract: A proposal to develop the Industrial Applications of Scanned Probe Microscopy (IASPM) workshops, which NIST has co-sponsored with Sematech, the ASTM E42.14 subcommittee, and the American Vacuum Society, over the past four years into a forum for assisting private-sector efforts towards the development of SPM standards and quantitative measurements is presented. The proposal is to be presented to the participants of the 4th IASPM workshop for discussion and possible future action.
Proceedings: Program of the 4th Industrial Applications of Scanned Probe Microscopy (IASPM) Conference, NIST
Location: Gaithersburg, MD
Keywords: industrial applications;scanned probe microscopy;standard reference materials
Research Areas: Metrology, Manufacturing