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Publication Citation: Stylus-Laser Surface Calibration System

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Author(s): Theodore V. Vorburger; Jun-Feng Song; T Giauque; Thomas B. Renegar; Eric P. Whitenton; M Croarkin;
Title: Stylus-Laser Surface Calibration System
Published: October 01, 1996
Abstract: A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser interferometer is mounted on the traversing unit of the stylus instrument to calibrate the instrument in the horizontal direction. The calibration uncertainty (¿2¿) for SRM 2075 is ¿1.2% for roughness calibrations ((Ra = 1 ¿m), and ¿0.06% for spatial wavelength calibrations (Sm = 800 ¿m).
Citation: Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume: 19(2-3)
Pages: pp. 157 - 163
Keywords: calibration;roughness;sinusoidal profiles;stylus instruments;stylus-laser;surface texture;traceability;uncertainty
Research Areas: Metrology, Manufacturing