| Author(s): |
Theodore V. Vorburger; Jun-Feng Song; T Giauque; Thomas B. Renegar; Eric P. Whitenton; M Croarkin; |
| Title: |
Stylus-Laser Surface Calibration System |
| Published: |
October 01, 1996 |
| Abstract: |
A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser interferometer is mounted on the traversing unit of the stylus instrument to calibrate the instrument in the horizontal direction. The calibration uncertainty (¿2¿) for SRM 2075 is ¿1.2% for roughness calibrations ((Ra = 1 ¿m), and ¿0.06% for spatial wavelength calibrations (Sm = 800 ¿m). |
| Citation: |
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology |
| Volume: |
19(2-3) |
| Pages: |
pp. 157 - 163 |
| Keywords: |
calibration;roughness;sinusoidal profiles;stylus instruments;stylus-laser;surface texture;traceability;uncertainty |
| Research Areas: |
Metrology, Manufacturing |
