NIST Authors in Bold
| Author(s): | Jun-Feng Song; Theodore V. Vorburger; |
|---|---|
| Title: | Uncertainty Procedure for NIST Surface Finish and Microform Calibration |
| Published: | January 01, 1996 |
| Abstract: | An uncertainty procedure is used for reporting the NIST surface finish and microform calibration uncertainties. The combined standard uncertainty is a combination of the uncertainty from the geometric non-uniformity of the measured surface, and the uncertainty from the measuring system, which includes the uncertainties from the calibration and check standards, instruments, environment, measuring setup, and from the long-term variations. Theoretical and experimental methods for testing instrument repeatability and noise, stylus tip size, filter and non-linearity are described. The relationships between the combined standard uncertainty and the calibration traceability, control limit of check standards, and reproducibility are also discussed. |
| Proceedings: | Proceedings of Measurement Science Conference |
| Location: | Anaheim, CA |
| Dates: | January 1, 1996 |
| Keywords: | calibration;microform;surface finish;surface metrology;traceability;uncertainty |
| Research Areas: | Metrology, Manufacturing |