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Publication Citation: Uncertainty Procedure for NIST Surface Finish and Microform Calibration

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Author(s): Jun-Feng Song; Theodore V. Vorburger;
Title: Uncertainty Procedure for NIST Surface Finish and Microform Calibration
Published: January 01, 1996
Abstract: An uncertainty procedure is used for reporting the NIST surface finish and microform calibration uncertainties. The combined standard uncertainty is a combination of the uncertainty from the geometric non-uniformity of the measured surface, and the uncertainty from the measuring system, which includes the uncertainties from the calibration and check standards, instruments, environment, measuring setup, and from the long-term variations. Theoretical and experimental methods for testing instrument repeatability and noise, stylus tip size, filter and non-linearity are described. The relationships between the combined standard uncertainty and the calibration traceability, control limit of check standards, and reproducibility are also discussed.
Proceedings: Proceedings of Measurement Science Conference
Location: Anaheim, CA
Dates: January 1, 1996
Keywords: calibration;microform;surface finish;surface metrology;traceability;uncertainty
Research Areas: Metrology, Manufacturing