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NIST Authors in Bold
|Author(s):||E C. Teague;|
|Title:||1/N Feynman Machines as a Path to Ultraminiaturization|
|Published:||September 01, 1995|
|Abstract:||The possibility of implementing Feynman''s proposal for achieving ultraminiaturization by an iterative process of three-dimensional machines making ever-smaller three-dimensional machines is considered in the nature of a thought experiment. A large array of Stewart platform machines is proposed as the machine/factory which possibly could have the capability to make ever-smaller versions of itself.|
|Conference:||Micromachining Technology II|
|Proceedings:||Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor|
|Pages:||pp. 82 - 88|
|Dates:||October 23, 1995|
|Research Areas:||Metrology, Manufacturing|