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Publication Citation: Patterning on Passivated Semiconductor Surfaces

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Author(s): John A. Dagata; E Snow;
Title: Patterning on Passivated Semiconductor Surfaces
Published: August 07, 1998
Abstract: Abstract unavailable.
Citation: Chapter in: Procedures in Scanning Probe Microscopies
Publisher: John Wiley & Sons, Hoboken, NJ
Pages: 672 pp.
Research Areas: Metrology, Manufacturing