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|Author(s):||John A. Dagata; A Diebold; C Shih; R Colton;|
|Title:||Summary Report: Second Workshop in Industrial Applications of Scanned Probe Microscopy|
|Published:||January 01, 1995|
|Abstract:||The Second Workshop on Industrial Applications of Scanned Probe Microscopy (IASPM) was held at the National Institute of Standards and Technology (NIST) Gaithersburg on May 2-3, 1995. The meeting, co-sponsored by NIST, SEMATECH, the American Society for Testing and Materials (ASTM) E42.14 Subcommittee, and the Manufacturing Science and Technology Group of the American Vacuum Society (AVS), was attended by approximately one hundred scanned probe microscopy (SPM) users, suppliers, and researchers from industry, government, and academia. The workshop featured over fifty industry overviews and technical presentations of SPM-based research and development (R&D) activities arranged into three oral focus sessions and poster presentations. A fourth session was devoted to progress on SPM measurement standardization and tool development issues which have occurred since the previous workshop.|
|Citation:||NIST Interagency/Internal Report (NISTIR) - 5752|
|Research Areas:||Manufacturing, Metrology|