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Publication Citation: Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features

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Author(s): T Mcwaid; Theodore V. Vorburger; Joseph Fu; Jun-Feng Song; Eric P. Whitenton;
Title: Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features
Published: January 01, 1994
Abstract: Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric microscope. The differences between measurements of the same surface feature as obtained with the different instruments illustrate the problem of methods divergence. Measurements are compared in an effort to point out, and explain, the observed methods divergence.
Citation: Nanotechnology
Volume: 5
Pages: pp. 33 - 43
Research Areas: Metrology, Manufacturing