NIST logo

Publication Citation: A Calibrated Atomic Force Microscope

NIST Authors in Bold

Author(s): T Mcwaid; J Schneir;
Title: A Calibrated Atomic Force Microscope
Published: January 01, 1994
Abstract: Atomic force microscope (AFM) is a rapidly emerging measurement technology. As the technology develops, it is being incorporated into industrial research and development, and manufacturing facilities. At present there are no sub-micrometer pitch or sub-ten nanometer height standards suitable for calibrating AFMs. University- and industry-based researchers are developing suitable calibration artifacts. We are developing an AFM capable of calibrating these artifacts.
Conference: Gaithersburg (MD)
Proceedings: Program of 1st Industrial Applications of Scanned Probe Microscopy; NIST
Pages: pp. 81 - 84
Research Areas: Metrology, Manufacturing