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|Author(s):||T Mcwaid; J Schneir;|
|Title:||A Calibrated Atomic Force Microscope|
|Published:||January 01, 1994|
|Abstract:||Atomic force microscope (AFM) is a rapidly emerging measurement technology. As the technology develops, it is being incorporated into industrial research and development, and manufacturing facilities. At present there are no sub-micrometer pitch or sub-ten nanometer height standards suitable for calibrating AFMs. University- and industry-based researchers are developing suitable calibration artifacts. We are developing an AFM capable of calibrating these artifacts.|
|Proceedings:||Program of 1st Industrial Applications of Scanned Probe Microscopy; NIST|
|Pages:||pp. 81 - 84|
|Research Areas:||Manufacturing, Metrology|