Publication Citation
NIST Authors in Bold
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| Author(s): | T Mcwaid; J Schneir; |
|---|---|
| Title: | A Calibrated Atomic Force Microscope |
| Published: | January 01, 1994 |
| Abstract: | Atomic force microscope (AFM) is a rapidly emerging measurement technology. As the technology develops, it is being incorporated into industrial research and development, and manufacturing facilities. At present there are no sub-micrometer pitch or sub-ten nanometer height standards suitable for calibrating AFMs. University- and industry-based researchers are developing suitable calibration artifacts. We are developing an AFM capable of calibrating these artifacts. |
| Conference: | Gaithersburg (MD) |
| Proceedings: | Program of 1st Industrial Applications of Scanned Probe Microscopy; NIST |
| Pages: | pp. 81 - 84 |
| Research Areas: | Metrology, Manufacturing |