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|Author(s):||Joseph Fu; M Croarkin; Theodore V. Vorburger;|
|Title:||The Measurement and Uncertainty of a Calibration Standard for the SEM|
|Published:||March 01, 1994|
|Abstract:||Standard Reference Material 484 is an artifact for calibration the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000X to 20000X. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484c and 484f.|
|Citation:||Journal of Research of the National Institute of Standards and Technology|
|Pages:||pp. 191 - 199|
|Keywords:||interferometer,precision,random error,SRM,systematic error,uncertainty|
|Research Areas:||Manufacturing, Metrology|
|PDF version:||Click here to retrieve PDF version of paper (6MB)|