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Publication Citation: The Measurement and Uncertainty of a Calibration Standard for the SEM

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Author(s): Joseph Fu; M Croarkin; Theodore V. Vorburger;
Title: The Measurement and Uncertainty of a Calibration Standard for the SEM
Published: March 01, 1994
Abstract: Standard Reference Material 484 is an artifact for calibration the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000X to 20000X. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484c and 484f.
Citation: Journal of Research of the National Institute of Standards and Technology
Volume: 99
Issue: 2
Pages: pp. 191 - 199
Keywords: interferometer;precision;random error;SRM;systematic error;uncertainty
Research Areas: Metrology, Manufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (6MB)