| Author(s): |
R Gupta; Robert Celotta; Zeina J. Kubarych; J Mcclelland; |
| Title: |
Nanofabrication of a two-dimensional array using laser-focused atomic deposition |
| Published: |
June 27, 1995 |
| Abstract: |
Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13? 1 nm high and having a full-width at half maximum of 80? 10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 ?m X 200 ?m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned. |
| Citation: |
Applied Physics Letters |
| Volume: |
67 (10) |
| Pages: |
pp. 1378 - 1380 |
| Keywords: |
Atom optics;Atomic deposition;Nanofabrication;Physics |
| Research Areas: |
Nanomanufacturing |
