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Publication Citation: Nanofabrication of a two-dimensional array using laser-focused atomic deposition

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Author(s): R Gupta; Robert Celotta; Zeina J. Kubarych; J Mcclelland;
Title: Nanofabrication of a two-dimensional array using laser-focused atomic deposition
Published: June 27, 1995
Abstract: Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13? 1 nm high and having a full-width at half maximum of 80? 10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 ?m X 200 ?m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.
Citation: Applied Physics Letters
Volume: 67 (10)
Pages: pp. 1378 - 1380
Keywords: Atom optics;Atomic deposition;Nanofabrication;Physics
Research Areas: Nanomanufacturing