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|Author(s):||R Gupta; Robert Celotta; Zeina J. Kubarych; J Mcclelland;|
|Title:||Nanofabrication of a two-dimensional array using laser-focused atomic deposition|
|Published:||June 27, 1995|
|Abstract:||Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13? 1 nm high and having a full-width at half maximum of 80? 10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 ?m X 200 ?m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.|
|Citation:||Applied Physics Letters|
|Pages:||pp. 1378 - 1380|
|Keywords:||Atom optics,Atomic deposition,Nanofabrication,Physics|