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Publication Citation: Electron Interactions With SF6

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Author(s): Loucas G. Christophorou; James K. Olthoff;
Title: Electron Interactions With SF6
Published: January 01, 2000
Abstract: Sulfur hexafluoride (SF6) is commonly used as a gaseous dielectric and as a plasma etching gas. In this work, the state of knowledge on electron-interaction cross sections and electron-swarm parameters in SF6 is comprehensively reviewed and critically assessed. Cross sections are presented and discussed for the following scattering processes: total electron scattering; differential elastic; elastic integral; elastic momentum; total vibrational; total and partial ionization; total dissociative and nondissociative electron attachment; dissociation into neutrals. Coefficients for electron-impact ionization, effective ionization, electron attachment , electron drift, and electron diffusion are also reviewed and assessed.
Citation: Journal of Physical and Chemical Reference Data
Volume: 29
Issue: 3
Pages: pp. 267 - 330
Keywords: ;coefficients;cross sections;electron scattering;electron swarms;electron transport;ionization;SF6;sulfur hexafluoride;
Research Areas: Electrical Metrology
PDF version: PDF Document Click here to retrieve PDF version of paper (40MB)