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Publication Citation: Measurements on the NIST GEC Reference Cell

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Author(s): J R. Roberts; James K. Olthoff; Richard J. Van Brunt; James R. Whetstone;
Title: Measurements on the NIST GEC Reference Cell
Published: January 01, 1991
Abstract:
Proceedings: Proc. Intl. Soc. for Optical Engineering (SPIE)Symp. on Advanced Techniques for Integrated Circuit Processing,
Location: Santa Clara, CA
Dates: October 1-5, 1990
Research Areas: Electronics & Telecommunications