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Publication Citation: Preoxidation as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions

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Author(s): William F. Egelhoff Jr.; Robert D. McMichael; Cindi L. Dennis; Mark D. Stiles; Alexander J. Shapiro; Brian B. Maranville; Cedric J. Powell;
Title: Preoxidation as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions
Published: October 01, 2006
Abstract: We have found that preoxidation of the bottom electrode prior to deposition of Al2O3 or MgO is very effective as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions. When orange-peel coupling is suppressed, the hard-axis saturation field of the free layer is greatly reduced.
Citation: IEEE Transactions on Magnetics
Volume: 42
Issue: 10
Pages: pp. 2664 - 2666
Research Areas: Nanomagnetics