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Publication Citation: Suppression of Orange-Peel Coupling in Magnetic Tunnel Junctions by Preoxidation

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Author(s): William F. Egelhoff Jr.; Robert D. McMichael; Cindi L. Dennis; Mark D. Stiles; Alexander J. Shapiro; Brian B. Maranville; Cedric J. Powell;
Title: Suppression of Orange-Peel Coupling in Magnetic Tunnel Junctions by Preoxidation
Published: April 17, 2006
Abstract: We have found that preoxidation of the bottom Co electrode in magnetic tunnel junctions (MTJs) very effectively suppresses orange-peel coupling. The result is a free layer that is much softer. Work by others has demonstrated that preoxidation is compatible with high-quality MTJ fabrication.
Citation: Applied Physics Letters
Volume: 88
Issue: 16
Pages: pp. 162508-1 - 162508-3
Research Areas: Nanomagnetics