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Publication Citation: Atoms join in the race for lithography in the next century

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Author(s): Jabez J. McClelland;
Title: Atoms join in the race for lithography in the next century
Published: January 01, 1998
Abstract: A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms.
Citation: Physics World
Volume: 11
Issue: 8
Keywords: atom lithography;contamination lithography;laser manipulation of atoms;metastable argon;metastable atoms;sub-100 nm lithography
Research Areas: Nanofabrication, Nanomanufacturing, and Nanoprocessing