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NIST Authors in Bold
|Author(s):||Jabez J. McClelland;|
|Title:||Atoms join in the race for lithography in the next century|
|Published:||January 01, 1998|
|Abstract:||A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms.|
|Keywords:||atom lithography,contamination lithography,laser manipulation of atoms,metastable argon,metastable atoms,sub-100 nm lithography|
|Research Areas:||Nanofabrication, Nanomanufacturing, and Nanoprocessing|