| Author(s): |
Jabez J. McClelland; |
| Title: |
Atoms join in the race for lithography in the next century |
| Published: |
January 01, 1998 |
| Abstract: |
A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms. |
| Citation: |
Physics World |
| Volume: |
11 |
| Issue: |
8 |
| Keywords: |
atom lithography;contamination lithography;laser manipulation of atoms;metastable argon;metastable atoms;sub-100 nm lithography |
| Research Areas: |
Nanofabrication, Nanomanufacturing, and Nanoprocessing |
