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Publication Citation: Nanofabrication via Atom Optics

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Author(s): Jabez J. McClelland;
Title: Nanofabrication via Atom Optics
Published: January 01, 2000
Abstract: A review is given of the field of nanofabrication via atom optics. Discussion is presented of the fundamentals of atom manipulation and atom optics, with emphasis on the aspects that are, or might be, useful for nanofabrication. The current status of nanofabrication with atom optics is presented, with discussion of the demonstrations that have been described in the literature so far. Possible future directions for the field are discussed.
Citation: Handbook of Nanostructured Materials and Nanotechnology, Vol 1
Publisher: Academic Press, San Diego, CA
Volume: 141
Pages: pp. 335 - 385
Keywords: atom lithography;atom optics;chromium;deposition;laser-focused;nanofabrication;nanostructures
Research Areas: Nanofabrication, Nanomanufacturing, and Nanoprocessing
PDF version: PDF Document Click here to retrieve PDF version of paper (1MB)