NIST Authors in Bold
| Author(s): | Jabez J. McClelland; W Anderson; Robert Celotta; |
|---|---|
| Title: | Nanofabrication via Atom Optics with Chromium |
| Published: | February 10, 1997 |
| Abstract: | Through the use of light forces exerted by near-resonant laser light, chromium atoms are focused as they deposit onto a substrate, forming nanometer-scale structures on the surface. The laser light is in the form of a standing wave, in which each node acts as an atom-optical "lens." The result is a highly accurate array of lines with a periodicity of λ/2 = 212.78 nm and full-width at half maximum as small as 38 nm. We discuss progress with this process, in particular the fabrication of a two-dimensional array, the creation of an array with λ/8 periodicity, the replication of the array in polymer material, the production of magnetic nanowires, and the reactive-ion etching of a chromium pattern on silicon to generate an array of distinct nanowires and/or nanotrenches. |
| Conference: | SPIE |
| Pages: | pp. 90 - 96 |
| Location: | San Jose, CA |
| Dates: | February 1-28, 1997 |
| Research Areas: | Nanofabrication, Nanomanufacturing, and Nanoprocessing |
| PDF version: | Click here to retrieve PDF version of paper (792KB) |