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Publication Citation: Nanofabrication via Atom Optics with Chromium

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Author(s): Jabez J. McClelland; W Anderson; Robert Celotta;
Title: Nanofabrication via Atom Optics with Chromium
Published: February 10, 1997
Abstract: Through the use of light forces exerted by near-resonant laser light, chromium atoms are focused as they deposit onto a substrate, forming nanometer-scale structures on the surface. The laser light is in the form of a standing wave, in which each node acts as an atom-optical "lens." The result is a highly accurate array of lines with a periodicity of λ/2 = 212.78 nm and full-width at half maximum as small as 38 nm. We discuss progress with this process, in particular the fabrication of a two-dimensional array, the creation of an array with λ/8 periodicity, the replication of the array in polymer material, the production of magnetic nanowires, and the reactive-ion etching of a chromium pattern on silicon to generate an array of distinct nanowires and/or nanotrenches.
Conference: SPIE
Pages: pp. 90 - 96
Location: San Jose, CA
Dates: February 1-28, 1997
Research Areas: Nanofabrication, Nanomanufacturing, and Nanoprocessing
PDF version: PDF Document Click here to retrieve PDF version of paper (811KB)