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|Author(s):||Alan H. Band; Joseph A. Stroscio;|
|Title:||A Closed Loop Controller for Electron-beam Evaporators|
|Published:||January 01, 1996|
|Abstract:||A simple instrument for automatically controlling the deposition rate of an electronbeam evaporator is described. The design incorporates a commercially available, microprocessor based, Proportional-Integral-Differential (PID) process controller which provides loop control and automatic determination of optimal proportional, integral and differential loop constants. A logarithmic amplifier is used to linearize the overall loop response. The controller is used in conjunction with a compact electron-beam heated evaporator.|
|Citation:||Review of Scientific Instruments|
|Pages:||pp. 2366 - 2369|
|PDF version:||Click here to retrieve PDF version of paper (300KB)|