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Publication Citation: A Closed Loop Controller for Electron-beam Evaporators

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Author(s): Alan H. Band; Joseph A. Stroscio;
Title: A Closed Loop Controller for Electron-beam Evaporators
Published: January 01, 1996
Abstract: A simple instrument for automatically controlling the deposition rate of an electronbeam evaporator is described. The design incorporates a commercially available, microprocessor based, Proportional-Integral-Differential (PID) process controller which provides loop control and automatic determination of optimal proportional, integral and differential loop constants. A logarithmic amplifier is used to linearize the overall loop response. The controller is used in conjunction with a compact electron-beam heated evaporator.
Citation: Review of Scientific Instruments
Volume: 67
Issue: 6
Pages: pp. 2366 - 2369
Research Areas: Instrumentation
PDF version: PDF Document Click here to retrieve PDF version of paper (300KB)