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Publication Citation: Nanofabrication of a Two-Dimensional Array Using Laser-Focused Atomic Deposition

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Author(s): R Gupta; Jabez J. McClelland; Zeina J. Kubarych; Robert Celotta;
Title: Nanofabrication of a Two-Dimensional Array Using Laser-Focused Atomic Deposition
Published: September 04, 1995
Abstract: Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13{plus or minus}1 nm high and having a full-width at half maximum of 80{plus or minus}10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 mu m X 200 mu m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.
Citation: Applied Physics Letters
Volume: 67
Issue: 10
Pages: pp. 1378 - 1380
Keywords: Atom Optics; Atomic Deposition; Nanofabrication; Physics
Research Areas: Nanofabrication, Nanomanufacturing, and Nanoprocessing