Publication Citation
NIST Authors in Bold
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| Author(s): | R Gupta; Zeina J. Kubarych; Jabez J. McClelland; Robert Celotta; |
|---|---|
| Title: | Pitch Standards via Laser-Focused Deposition |
| Published: | January 01, 1994 |
| Abstract: | |
| Conference: | Conference on Industrial Applications of Scanned Probe Microscopy |
| Location: | Gaithersburg, MD |
| Dates: | March 24-25, 1994 |
| Keywords: | MICROSCOPY |
| Research Areas: | Nanometrology |