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Publication Citation: Pitch Standards via Laser-Focused Deposition

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Author(s): R Gupta; Zeina J. Kubarych; Jabez J. McClelland; Robert Celotta;
Title: Pitch Standards via Laser-Focused Deposition
Published: January 01, 1994
Abstract:
Conference: Conference on Industrial Applications of Scanned Probe Microscopy
Location: Gaithersburg, MD
Dates: March 24-25, 1994
Keywords: MICROSCOPY
Research Areas: Nanometrology