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Publication Citation: Simple, Compact, High-Purity Cr Evaporator for UHV

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Author(s): Jabez J. McClelland; John Unguris; R E. Scholten; Daniel T. Pierce;
Title: Simple, Compact, High-Purity Cr Evaporator for UHV
Published: September 01, 1993
Abstract: A simple, compact Cr evaporator is constructed by electroplating Cr metal onto the tip of a W hairpin filament. At 5 cm from the evaporator, deposition rates up to 10 nm min-1 (flux {asymp} 1019 atoms m-2s-1) have been obtained, with total deposition thickness in excess of 400 nm. Auger analyses of thin film deposited in ultrahigh vacuum show impurities below detectability.
Citation: Journal of Vacuum Science and Technology A
Volume: 11
Issue: 5
Pages: pp. 2863 - 2864
Research Areas: Instrumentation