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Publication Citation: The Chemisorption of SiCl4, Si2Cl6, and Chlorine on Si(111) 7×7

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Author(s): Lloyd J. Whitman; S Joyce; J Yarmoff; F McFeeley; L Terminello;
Title: The Chemisorption of SiCl4, Si2Cl6, and Chlorine on Si(111) 7×7
Published: January 01, 1990
Abstract:
Citation: Vacuum
Volume: 41
Pages: pp. 1056 - 1057
Research Areas: Surface Physics