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Publication Citation: Scanning Tunneling Microscopy (STM) of a Diamond-turned Surface and a Grating Replica

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Author(s): Robert A. Dragoset; Theodore V. Vorburger;
Title: Scanning Tunneling Microscopy (STM) of a Diamond-turned Surface and a Grating Replica
Published: January 01, 1987
Abstract:
Citation: SPIE, Metrology Figure and Finish
Volume: 749
Research Areas: Scanning tunneling microscopy (STM)