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Publication Citation: Third-Order Aberration Coefficients of Electron Lenses II

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Author(s): C Kuyatt; D DiChio; S Natali;
Title: Third-Order Aberration Coefficients of Electron Lenses II
Published: November 01, 1973
Abstract:
Citation: Journal of Vacuum Science and Technology
Volume: 10
Issue: 6
Pages: pp. 1124 - 1126
Research Areas: Electron Physics