| Author(s): |
Donna C. Hurley; Malgorzata Kopycinska-Mueller; Tony B. Kos; |
| Title: |
Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy |
| Published: |
January 31, 2007 |
| Abstract: |
We are developing tools that use the atomic force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic force acoustic microscopy (AFAM) involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers our understanding of patterned surfaces, thin films, and nanoscale structures. |
| Citation: |
Jom |
| Volume: |
59 |
| Issue: |
1 |
| Pages: |
pp. 23 - 29 |
| Keywords: |
atomic force microscopy, mechanical properties, atomic force acoustic microscopy, nanomechanics |
| Research Areas: |
Nanotechnology |
| PDF version: |
 Click here to retrieve PDF version of paper (1MB) |
