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|Author(s):||Donna C. Hurley; Malgorzata Kopycinska-Mueller; Tony B. Kos;|
|Title:||Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy|
|Published:||January 31, 2007|
|Abstract:||We are developing tools that use the atomic force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic force acoustic microscopy (AFAM) involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers our understanding of patterned surfaces, thin films, and nanoscale structures.|
|Pages:||pp. 23 - 29|
|Keywords:||atomic force microscopy, mechanical properties, atomic force acoustic microscopy, nanomechanics|
|PDF version:||Click here to retrieve PDF version of paper (1MB)|