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Publication Citation: Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy

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Author(s): Donna C. Hurley; Malgorzata Kopycinska-Mueller; Tony B. Kos;
Title: Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy
Published: January 31, 2007
Abstract: We are developing tools that use the atomic force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic force acoustic microscopy (AFAM) involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers our understanding of patterned surfaces, thin films, and nanoscale structures.
Citation: Jom
Volume: 59
Issue: 1
Pages: pp. 23 - 29
Keywords: atomic force microscopy, mechanical properties, atomic force acoustic microscopy, nanomechanics
Research Areas: Nanotechnology
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