Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).
NIST Authors in Bold
|Author(s):||Donna C. Hurley; Malgorzata Kopycinska-Mueller; Tony B. Kos; Roy H. Geiss;|
|Title:||Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy|
|Published:||August 31, 2005|
|Abstract:||We are developing metrology for rapid, quantitative assessment of elastic porperties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable modulus measurements at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.|
|Citation:||Advanced Engineering Materials|
|Pages:||pp. 713 - 718|
|Keywords:||atomic force acoustic microscopy,atomic force microscopy,elastic properties,nanomechanics|
|PDF version:||Click here to retrieve PDF version of paper (331KB)|