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Publication Citation: Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy

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Author(s): Donna C. Hurley; Malgorzata Kopycinska-Mueller; Tony B. Kos; Roy H. Geiss;
Title: Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy
Published: August 31, 2005
Abstract: We are developing metrology for rapid, quantitative assessment of elastic porperties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable modulus measurements at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.
Citation: Advanced Engineering Materials
Volume: 8
Pages: pp. 713 - 718
Keywords: atomic force acoustic microscopy;atomic force microscopy;elastic properties;nanomechanics
Research Areas: Nanotechnology
PDF version: PDF Document Click here to retrieve PDF version of paper (331KB)