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Publication Citation: Electron Collision Cross Sections Derived from Critically Assessed Data

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Author(s): Loucas G. Christophorou; James K. Olthoff;
Title: Electron Collision Cross Sections Derived from Critically Assessed Data
Published: July 01, 1999
Abstract: Electron-molecule collisions are among the most fundamental processes in gas discharges. They are also the precursors of the ions and the radicals which drive the etch, cleaning, or deposition processes in plasma reactors. Hence, there is a need for a quantitative understanding of the fundamental electron collision processes in terms of cross sections. Unfortunately, cross sections for critical electron-collision processes often are not known. In this paper cross sections are reported for indirect (resonance enhanced) electron-impact vibrational excitation of the plasma processing gases CF4 and Cl2, and for total electron scattering for CF4 below {difference} 1 eV. None of these cross sections are presently known from direct measurements. Their determination was made by a critical assessment of other electron collision cross sections for these molecules. Also reported are swarm-adjusted electron-beam attachment cross sections for Cl2.
Proceedings: Proc. XXIV Intl. Conf. on the Physics of Ionized Gases (ICPIG)
Volume: 1
Pages: pp. 49 - 50
Location: Warsaw, PL
Dates: July 11-16, 1999
Keywords: CF4,Cl2,cross sections,dissociative attachment,electron scattering,vibrational excitation
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (1MB)