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Publication Citation: Nanofluidic Structures with Complex Three Dimensional Surfaces

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Author(s): Samuel M. Stavis; Elizabeth Strychalski; Michael Gaitan;
Title: Nanofluidic Structures with Complex Three Dimensional Surfaces
Published: March 31, 2009
Abstract: A fabrication process was developed to construct nanofluidic devices with complex three dimensional (3D) topographies. A single layer of grayscale photolithography enabled arbitrary and simultaneous control of numerous nanoscale etch depths in a fused silica substrate, and glass wafer bonding was used to form enclosed nanofluidic structures with depths varying from (11 ± 4) nm to (624 ± 7) nm (μ ± σ). Fluorescent nanoparticles and biopolymers were manipulated in a 3D test structure.
Citation: Nanotechnology
Issue: 20
Pages: 7 pp.
Keywords: Nanofluidic; DNA; Single Molecule; Separation; Grayscale; Graytone; Photolithography
Research Areas: Nanotechnology, Nanofluidics, DNA
PDF version: PDF Document Click here to retrieve PDF version of paper (1MB)