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|Author(s):||Samuel M. Stavis; Elizabeth Strychalski; Michael Gaitan;|
|Title:||Nanofluidic Structures with Complex Three Dimensional Surfaces|
|Published:||March 31, 2009|
|Abstract:||A fabrication process was developed to construct nanofluidic devices with complex three dimensional (3D) topographies. A single layer of grayscale photolithography enabled arbitrary and simultaneous control of numerous nanoscale etch depths in a fused silica substrate, and glass wafer bonding was used to form enclosed nanofluidic structures with depths varying from (11 ± 4) nm to (624 ± 7) nm (μ ± σ). Fluorescent nanoparticles and biopolymers were manipulated in a 3D test structure.|
|Keywords:||Nanofluidic, DNA, Single Molecule, Separation, Grayscale, Graytone, Photolithography|
|Research Areas:||Nanotechnology, Nanofluidics, DNA|
|PDF version:||Click here to retrieve PDF version of paper (1MB)|