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Assessment of Industry Research Priorities for Intelligent Sensors and Control

Published

Author(s)

YaShian Li-Baboud, Julien M. Amelot, Julien Le Guen, Alan Weber, Paul McGuire

Abstract

Sensor networks and intelligent control have garnered much excitement among researchers in industry, government, and academia. Revolutionary advances have been made in the deployment of sensors and control systems for driving intelligent applications in a diverse array of fields from tsunami prediction to smart buildings to robotics and autonomous vehicles, such advancements in embedded technologies also hold great potential for improving intelligent manufacturing paradigms in Advanced Process Control (APC). The objective of the presentation will be to present an assessment of the current and projected semiconductor industry challenges and requirements for intelligent sensors and control. The presentation will also enumerate and discuss the research opportunities and priorities based on multi-disciplinary perspectives from experts on using, designing, and manufacturing intelligent sensor and control systems in industry, government and academia.
Proceedings Title
AEC/APC Symposium XX
Conference Dates
October 6-8, 2008
Conference Location
Salt Lake City, UT

Keywords

sensor networks, intelligent control, advanced process control, semiconductor manufacturing

Citation

Li-Baboud, Y. , Amelot, J. , Le, J. , Weber, A. and McGuire, P. (2008), Assessment of Industry Research Priorities for Intelligent Sensors and Control, AEC/APC Symposium XX, Salt Lake City, UT, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33162 (Accessed March 19, 2024)
Created October 1, 2008, Updated February 19, 2017